Viscous fluid–structure interaction of micro-resonators in the beam–plate transition

We numerically investigate the fluid–structure interaction of thin elastic cantilever micro-structures in viscous fluids. The Kirchhoff plate equation describes dynamics structure, and a boundary integral formulation represents fluid flow. show how displacement spectrum structures changes as geometry is altered from narrow beam to wide liquid. For beams, exhibits only few resonance frequencies, which correspond vibrational modes described by Euler–Bernoulli (Euler–Bernoulli modes). plates several additional frequencies associated with plate’s torsional higher-order modes. Wide exhibit higher damping coefficients, but due an increased added-mass effect, also Q-factors than slender beams. An investigation into flow reveals that for wider plates, energy dissipation near edges increase, resulting coefficients. Concomitantly, region minimal center appears effect. Higher-order lower Q-factor decreased at caused appearance circulation zones on both sides plate. This edge reduces yielding Q-factors. anticipate results presented here will play vital role conceiving novel MEMS resonators operation